AGI, Abbie Gregg, Inc. | Cleanroom Consultants | Semiconductors, FPD, Nano, MEMS, Bio

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staff biographies

TB - Senior Technical Staff, EHS, Chemical Processes, CVD / Industrial

MAJOR INTERESTS AND SKILLS
Process and tool design, start up and qualification, statistics and experimental design. EHS and risk analysis, facility validation, facility engineering and construction. Analytical testing, sampling strategies and procedures, automated and manual handling of high purity Process fluids and gases. Chemical and gas intensive processes and tools expert. Wafer Fab Operations. Chemical and Gas management operations.

EXPERIENCE
Three years as a consultant supporting front-end processes. A recent project included scale up of high purity chemical production for FPD and semiconductor applications. Recent industrial engineering project for scale up of wafer size and volume, including team leadership for critical Wet Etch and Thin Films teams, tool procurement and fit up, facilities coordination, and capacity scheduling. Other projects included defining, documenting and training safe chemical and gas handling, lockout/tagout operations and preventive maintenance procedures for FPD manufacturing scale up in the areas of CVD, wet etch, strip, and clean. Also provided research consultation with a primary focus linking technology drivers of the ITRS to factory design and construction as a key member of the International Roadmap for Semiconductors Facilities Team. Diverse projects completed in tool automation for unique substrate processing, as well as technical and market analysis of new process technologies.

In a project director role, developed new technology and associated business strategies to increase revenue and profitability for emerging semiconductor-facility requirements. Developed wastewater treatment strategies and systems for the abatement of copper in CMP waste streams and abatement of arsenic in GaAs Backgrind waste streams. Created and disseminated process engineering standards for new design projects, including fluid hydraulics calculations (personally developed), pump sizing calculations (commercially developed), interactive database for utility matrices, and RCRA reporting.

Consulted as the ‘Total Chemical Management (TCM) Business Manager’. Established TCM services and support infrastructure, sales and marketing strategies. Developed standard procedures, cost models and manpower loading models for on-site chemical management teams. Developed and administered a TCM business alliance between FSI and Praxair. Developed conceptual designs for new products to lower customer’s cost for chemicals.

As a Process Chemicals Manager, managed all aspects of safety, quality, pricing, and delivery for all gaseous and liquid chemicals and ultra pure water. Managed factory start up and operation of this service / support organization consisting of over 50 people to $50M annual budget Established standard chemical testing methodologies. Reduced operational costs by 35% via improvement to the supplier’s cylinder cleaning and inventory procedures.

Developed 5 to 10 nm Gate Oxide layers for use in low-voltage semiconductor process. Participated in SEMATECH-supported projects to qualify gas-phase wafer cleaning technologies. Managed start up and qualification of a CVD and Thin Films area, including operations, process and equipment responsibilities. Managed specialty gas delivery start up and qualification and operational support ($25M). Managed a team of 15 engineers establishing a factory start up methodology for process qualification.

EDUCATION
Kansas State University, BS; Chemical Engineering
Kansas State University, BS; Chemistry