AGI, Abbie Gregg, Inc. | Cleanroom Consultants | Semiconductors, FPD, Nano, MEMS, Bio

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staff biographies

MRY - Senior Technical Staff, Process Engineering

MAJOR INTERESTS AND SKILLS
R & D or manufacturing of flat panel displays, semiconductor and MEMS devices, specializing in photolithography and wet etch process development and scale-up. Leadership of process engineering and development teams.

EXPERIENCE
Seven years at AGI as an Engineering Consultant. Recent project included technology transfer and tool start up engineering at display fab, focusing on photolithography and wet etch, including automated wet clean and etch tool process optimization. Also, developed operational specifications for photolithography and wet etch. Other projects included optimization for passive matrix OLED processes and LCD sensor, as well as process analysis for GaAs fab start-up. Achieved 400% increase in throughput and >90% yield in photolith process for OLED client. Responsibilities included worldwide technology transfer support for this Fortune 500 Client, including extensive work in Asia.

Fourteen years at OIS Optical Imaging Systems, Inc., Northville, MI, as Manager, Photolithography, Wet Process, and Color Filter. Responsible for set up and implementing into production a $100 million AMLCD/ X-ray sensor facility for OIS. Managed a department of thirty, including process engineers, production supervisors, group leaders, and operators. Developed and performed acceptance tests for all photolithographic tools and wet process. Set process parameters for glass cleaners, coaters, developers, etchers, and strippers. Optimized photolithography, wet process, and color filters by using JMP DOE in the manufacturing of TFT active matrix back planes, pigmented color filters, and MEMS displays. Set up the SPCs for manufacturing process and provided QA department documentation to achieve ISO 9001 certification. Interacted with PECVD and thin film sputtering departments for integration and optimization of TFT process. Worked with production control, program management, and manufacturing departments to achieve on-time delivery of parts. Yield enhancement and failure analysis using SEM / EDX / Orbotech inspection and continuous process improvement. Improved yield by > 80% for several types of TFT displays and sensors. Process development and manufacturing of Diode display and TFT active matrix display on 6”, 10” and 350 x 400mm substrates. Set up process parameters for photo resist coating using Convac, Steag and SVG Spin Coaters, exposure using Nikon Stepper, Azores Stitcher, and Canon Projection Aligners, developing using Convac and Steag spray developers, wet etching and stripping using Semifab dip tanks; glass clean, etch and solvent strip, using SSEC and Steag automated equipment. Developed the polyimide color filter process for manufacturing using Headway spin coater and Convac developer.

Team member of U.S. Display Consortium (USDC) projects including color filter material and fabrication, wet process tool, and high throughput large area exposure system for flat panel display.

Previous experience includes four years at Energy Conversion Devices, Inc., Troy, MI, as a chemist working on organic synthesis of chemicals for non-silver photosensitive film composed of TEBAC (Tellurium – Bisacetophenone Dichloride).

EDUCATION
Akron University, Akron, OH: Master of Science in Organic Chemistry
National Taiwan University, Taipei, Taiwan: M.S. in Agricultural Chemistry, B.S. in Agricultural Chemistry
Fluent Speaker in Chinese Languages

PATENTS
Tellurium imaging composition including improved reductant precursor.
Reductant precursor for Tellurium imaging compositions.

SPECIAL TRAINING
Practical Microlithography with Experimental Design and SPC Short Course by Arizona State University
Electrostatic Discharge Sensitivity Training
Design and Analysis of Experiments Using JMP Software
Interaction Management Training, AVS – ThinFilm Deposition by Evaporation