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staff biographies

ML - Senior Technical Staff, Photolithography Processing and Operations

MAJOR INTERESTS AND SKILLS

Photolithography process technology and optimization. Photo equipment, process techniques, SPC and problem solving. Photo process and defect troubleshooting. Research, development, consulting in advanced imaging technology, wafer processing or resist systems. Application of microlithography and related processes to wafer fabrication for Silicon, Gallium Arsenide or other materials. Process planning and facilitization for advanced imaging and processing applications, including unique imaging requirements. Technology transfer, training or tutorial technical seminars for participants at all educational levels.

EXPERIENCE
Thirteen years as an industrial consultant, team leader and instructor in microlithography, specializing in photo resist process optimization and lift off processing. Extensive experience with a wide variety of substrate types and exposure systems. Industrial consultant, specializing in microlithography services. Have completed various consulting projects involving process development, facility engineering, yield enhancement and training in areas of photolithography, cleanroom operations, or general semiconductor processing. Short courses in Practical Microlithography, Statistical Process Control, and Experimental Design have been offered through the University of Arizona, Arizona State University, and Karl Suss USA.

Research engineer in the Microelectronics Processing Laboratory at the University of Arizona. Taught graduate-level courses in Microlithography and Optics. Manager, Microelectronics Processing Laboratory; Research Engineer, Participated in various research projects, including SEMATECH Center of Excellence in Contamination Control, Center for Microcontamination Control; Adjunct Lecturer/Engineer, Upgraded photoresist processing area and processes used in the Microelectronics Laboratory.

Nine years on the engineering staff at Texas Instruments Corporation working on photoresist and process development. Technical Areas: Photoresist Product Quality, Substrate Etching and Cleaning Technology, Spin-on Dopant Technology, Equipment Development and Testing, Electron Resist Development.

Senior Engineer at Motorola responsible for the submicron imaging technology program and management of the support laboratory for VLSI and VHSIC technologies. Senior Staff Scientist with KTI Chemicals providing technical assistance to customers and presenting numerous seminars.

EDUCATION
BS Chemistry, Bishop College, Dallas, TX

Masters work at Southern Methodist University, Dallas, TX

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