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| King Abdullah University of Science and Technolog (KAUST) | Advanced Fabrication Cleanroom | ||||||||||||||||||||||||||||||||
| > Awarded R&D Magazine Lab of the Year 2011 > Awarded AIA/COTE Top Ten Green Projects 2010 |
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| Project Features: > Clean Class 100 and 1000 > 2” to 200mm Wafer Capability > Nanotechnology, MEMS and Microelectronics Capabilities > One-Up Tool set, Over 170 Tools > H5 Cleanroom with HPM Storage Rooms > E-beam Lithography > Advanced Etch and Thin Films Capabilities > Mask Making > DUV Stepper Capability |
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| Services Provided by AGI for Project: > Cleanroom Design: Programming through > Construction Documents > Construction Administration > On Site Cleanroom Contractor Supervision > Tool Procurement Support / Specification Development / > Negotiation with Vendors / Factory Acceptance Testing > Tool Installation Design and Construction Supervision > Shipping / Logistics Support for Process Tools and > Cleanroom Related Items > Materials and Supplies Procurement for Start-up > EHS and Code Consulting > Project Management for Bulk Nitrogen |
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| Building Uses: > The advanced nanofabrication core facility will integrate > classic semiconductor tools and processes with biological, > chemical, and medical substrates to support research in > electronic and photonic devices, microelectromechanical > devices, advanced materials processing, and biotechnology > devices. > The core facility offers cross-disciplinary expertise in the > areas of spectroscopy, biology, chemistry, physics, optics, > electrical engineering, and engineering science. A full > complement of utilities including high purity DI water, high > purity nitrogen, reactive gases, and chilled water are > available to each process bay. These utilities also include > a wide range of processing and characterization equipment > that enables fabrication of electrical, optical, and > micromechanical devices to support fundamental and > applied research in diverse fields spanning from > electronics to medicine. |
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| Client Testimonials: > “The [KAUST] cleanroom is certainly a showpiece.” ~ Gary Kuzma PE, CEM, LEED® AP, GBE, Senior Vice President, Director of MEP Engineering, HOK, November 2009 > “…Thank you for being so caring about this project. You have been working day and night for the best interest of KAUST Project. Thank you again.” ~ Tawfeeq Aljohani, Lead Project Engineer, Academic Buildings & Laboratory Division, King Abdullah University Projects Department, KAUST > “…I second Tawfeeq in his comments and I extend my appreciation to you and your team for the commitment and dedication you are putting in KAUST project. ~ Abdulla M. Al-Saleh, Sr. Project Manager, Academic, Administration & Laboratory Buildings Division, ASC Company Representative (Head of Project for Aramco), Aramco Overseas Company B.V. |
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